Description
Hexamethyl Disilazane (HMDS, CAS: 999-97-3, Synonyms: ((CH3)3Si)2NH;1,1,1,3,3,3-hexamethyl-disilazan;1,1,1-trimethyl-n-(trimethylsilyl)-silanamin;Disilazane,1,1,1,3,3,3hexamethyl-;BIS(TRIMETHYLSILYL)AMINE;HMDS;hexamethyl disilizane; HEXAMETHYLDISILYLAMINE) is a colorless, transparent and mobile organic silicon compound with a special ammonia odor. As an efficient silylating agent and surface treatment agent, it is widely used in semiconductor manufacturing, pharmaceutical intermediate synthesis, analytical chemistry and other fields. It acts as a key silylating protective agent in drug synthesis, a photoresist adhesion promoter in semiconductor industry, and a derivative reagent in analytical detection. We provide high-quality products that comply with relevant standards, trusted by industries worldwide, with advanced facilities adhering to global regulatory requirements.
◆Chemical Properties
|
Melting point |
-78 °C |
|
Boiling point |
125 °C(lit.) |
|
density |
0.774 g/mL at 25 °C(lit.) |
|
vapor density |
4.6 (vs air) |
|
vapor pressure |
20 hPa (20 °C) |
|
refractive index |
n20/D 1.407(lit.) |
|
Fp |
57.2 °F |
|
solubility |
Miscible with acetone, benzene, ethyl ether, heptane and perchloroethylene. |
|
pka |
30(at 25℃) |
|
Specific Gravity |
0.774 |
|
Odor |
Ammonia odour |
|
PH Range |
8.5 |
|
explosive limit |
0.8-25.9%(V) |
|
Sensitive |
Moisture Sensitive |
|
Hydrolytic Sensitivity |
7: reacts slowly with moisture/water |
|
Air & Water Reactions |
Highly flammable. Moisture sensitive. |
◆Applications
|
Sr. No. |
Description |
Application |
|
1 |
Silylation reagent & organic silicon intermediate |
Pharmaceutical intermediate synthesis & chemical derivatization |
|
2 |
Surface treatment agent for electronic materials |
Semiconductor photoresist treatment & wafer surface modification |
|
3 |
GC derivatization reagent for analytical chemistry |
Chromatographic analysis sample pretreatment |
|
4 |
Protective agent for organic synthesis |
Hydroxyl / amino / carboxyl group silylation protection |
|
5 |
Coating & rubber processing additive |
Surface hydrophobic modification & crosslinking auxiliary |
◆Product Specifications
Hexamethyl Disilazane (HMDS, CAS NO.999-97-3) should be handled according to standard chemical industry and pharmaceutical intermediate safety procedures. Appropriate industrial hygiene and protective measures must be followed during handling, storage and operation.
- Use appropriate personal protective equipment (PPE)
- Avoid inhalation of vapor or mist and contact with skin, eyes and clothing
- Handle in controlled, well-ventilated environments
- Keep away from heat, sparks, open flames and hot surfaces
- Protect from moisture and avoid contact with water
- Follow chemical handling, storage and containment protocols
- Refer to Safety Data Sheet (SDS) for detailed safety, handling and storage information
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